Abstract / Description of output
Focused Ion Beam (FIB) systems are commonly used to image, repair and modify integrated circuits by cutting holes in passivation to create vias or to selectively break metal tracks. The ion beam can also be used to deposit a metal, such as platinum, to create new connections. These techniques are very useful tools for debugging designs and testing possible changes to the circuit without the expense of new mask sets or silicon. This paper presents test structures to characterise a FIB platinum deposition process. Sheet resistance test structures have been fabricated using a FIB tool and the results of testing these structures are presented. This data will enable resistors with a known value to be fabricated in addition to conducting straps.
Original language | English |
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Title of host publication | ICMTS 2002:PROCEEDINGS OF THE 2002 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES |
Place of Publication | NEW YORK |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 157-162 |
Number of pages | 6 |
ISBN (Print) | 0-7803-7464-9 |
Publication status | Published - 2002 |
Event | 15th International Conference on Microelectronic Test Structures - CORK Duration: 8 Apr 2002 → 11 Apr 2002 |
Conference
Conference | 15th International Conference on Microelectronic Test Structures |
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City | CORK |
Period | 8/04/02 → 11/04/02 |