Test structures for the wafer mapping and correlation of electrical, mechanical and high frequency magnetic properties of electroplated ferromagnetic alloy films

E Sirotkin, S Smith, Ross Walker, J.G. Terry, A J Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2015 International Conference on Microelectronic Test Structures (ICMTS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
Publication statusPublished - 2015

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