Projects per year
Abstract
This paper presents a method of electrically determining the permeability of
patterned, electroplated ferromagnetic alloys and brings together the
simultaneous wafer mapping of relative permeability, electrical resistivity and
mechanical strain of these electrodeposited films, as well as the layer
thickness and alloy composition. The wafer mapping of all these properties is
implemented using a set of simple, automated electrical and optical techniques
that facilitate the quantification of the spatial correlation between different
parameters. This enables the uniformity of conductive ferromagnetic films to be
analysed and supports the optimization of the physical properties of these
materials as well as the processes used to deposit them.
patterned, electroplated ferromagnetic alloys and brings together the
simultaneous wafer mapping of relative permeability, electrical resistivity and
mechanical strain of these electrodeposited films, as well as the layer
thickness and alloy composition. The wafer mapping of all these properties is
implemented using a set of simple, automated electrical and optical techniques
that facilitate the quantification of the spatial correlation between different
parameters. This enables the uniformity of conductive ferromagnetic films to be
analysed and supports the optimization of the physical properties of these
materials as well as the processes used to deposit them.
Original language | English |
---|---|
Pages (from-to) | 201-208 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
DOIs | |
Publication status | Published - 21 Jun 2016 |
Fingerprint
Dive into the research topics of 'Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films'. Together they form a unique fingerprint.Projects
- 3 Finished
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Patterned Magnetic Cores (PaMaCore) for Efficient Power Devices
Terry, J. (Principal Investigator) & Walton, A. (Co-investigator)
19/01/15 → 18/07/15
Project: Research
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manufacturability of Monolithic, Ferromagentic Core, Power Inductors
Walton, A. (Principal Investigator)
Non-EU industry, commerce and public corporations
1/12/06 → 30/11/11
Project: Research
Datasets
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NiFe magnetic alloy test structures data
Smith, S. (Creator), Sirotkin, E. (Creator) & Walker, R. (Creator), Edinburgh DataShare, 20 Jun 2016
DOI: 10.7488/ds/1427, http://hdl.handle.net/10283/2035
Dataset
Profiles
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Jonathan Terry
- School of Engineering - Senior Lecturer, Head of Graduate School
Person: Academic: Research Active