Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films

Evgeny Sirotkin; Stewart Smith; Ross Walker; Jonathan Terry; Anthony Walton

doi:10.1109/TSM.2016.2583068

Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films

Evgeny Sirotkin, Stewart Smith, Ross Walker, Jonathan Terry, Anthony Walton

School of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents a method of electrically determining the permeability of
patterned, electroplated ferromagnetic alloys and brings together the
simultaneous wafer mapping of relative permeability, electrical resistivity and
mechanical strain of these electrodeposited films, as well as the layer
thickness and alloy composition. The wafer mapping of all these properties is
implemented using a set of simple, automated electrical and optical techniques
that facilitate the quantification of the spatial correlation between different
parameters. This enables the uniformity of conductive ferromagnetic films to be
analysed and supports the optimization of the physical properties of these
materials as well as the processes used to deposit them.

Original language	English
Pages (from-to)	201-208
Journal	IEEE Transactions on Semiconductor Manufacturing
DOIs	https://doi.org/10.1109/TSM.2016.2583068
Publication status	Published - 21 Jun 2016

Access to Document

10.1109/TSM.2016.2583068

Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy FilmsAccepted author manuscript, 5.52 MB

Patterned Magnetic Cores (PaMaCore) for Efficient Power Devices
Terry, J. (Principal Investigator) & Walton, A. (Co-investigator)
Other
19/01/15 → 18/07/15
Project: Research
SMART microsystems
Walton, A. (Principal Investigator)
EPSRC
1/04/10 → 28/02/15
Project: Research
manufacturability of Monolithic, Ferromagentic Core, Power Inductors
Walton, A. (Principal Investigator)
Non-EU industry, commerce and public corporations
1/12/06 → 30/11/11
Project: Research

NiFe magnetic alloy test structures data
Smith, S. (Creator), Sirotkin, E. (Creator) & Walker, R. (Creator), Edinburgh DataShare, 20 Jun 2016
DOI: 10.7488/ds/1427, http://hdl.handle.net/10283/2035
Dataset

Jonathan Terry
- School of Engineering - Senior Lecturer, Head of Graduate School
Person: Academic: Research Active

Cite this

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title = "Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films",

abstract = "This paper presents a method of electrically determining the permeability ofpatterned, electroplated ferromagnetic alloys and brings together thesimultaneous wafer mapping of relative permeability, electrical resistivity andmechanical strain of these electrodeposited films, as well as the layerthickness and alloy composition. The wafer mapping of all these properties isimplemented using a set of simple, automated electrical and optical techniquesthat facilitate the quantification of the spatial correlation between differentparameters. This enables the uniformity of conductive ferromagnetic films to beanalysed and supports the optimization of the physical properties of thesematerials as well as the processes used to deposit them. ",

author = "Evgeny Sirotkin and Stewart Smith and Ross Walker and Jonathan Terry and Anthony Walton",

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doi = "10.1109/TSM.2016.2583068",

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AU - Walton, Anthony

PY - 2016/6/21

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N2 - This paper presents a method of electrically determining the permeability ofpatterned, electroplated ferromagnetic alloys and brings together thesimultaneous wafer mapping of relative permeability, electrical resistivity andmechanical strain of these electrodeposited films, as well as the layerthickness and alloy composition. The wafer mapping of all these properties isimplemented using a set of simple, automated electrical and optical techniquesthat facilitate the quantification of the spatial correlation between differentparameters. This enables the uniformity of conductive ferromagnetic films to beanalysed and supports the optimization of the physical properties of thesematerials as well as the processes used to deposit them.

AB - This paper presents a method of electrically determining the permeability ofpatterned, electroplated ferromagnetic alloys and brings together thesimultaneous wafer mapping of relative permeability, electrical resistivity andmechanical strain of these electrodeposited films, as well as the layerthickness and alloy composition. The wafer mapping of all these properties isimplemented using a set of simple, automated electrical and optical techniquesthat facilitate the quantification of the spatial correlation between differentparameters. This enables the uniformity of conductive ferromagnetic films to beanalysed and supports the optimization of the physical properties of thesematerials as well as the processes used to deposit them.

U2 - 10.1109/TSM.2016.2583068

DO - 10.1109/TSM.2016.2583068

M3 - Article

SN - 0894-6507

SP - 201

EP - 208

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

ER -

Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films

Abstract

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Projects

Patterned Magnetic Cores (PaMaCore) for Efficient Power Devices

SMART microsystems

manufacturability of Monolithic, Ferromagentic Core, Power Inductors

Datasets

NiFe magnetic alloy test structures data

Profiles

Jonathan Terry

Cite this