Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Ewen Blair, Damion Corrigan, Ilka Schmueser, Jonathan Terry, Stewart Smith, Andrew Mount, Anthony Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.
Original languageEnglish
Title of host publication2016 International Conference on Microelectronic Test Structures (ICMTS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages158-162
Number of pages5
DOIs
Publication statusPublished - 29 Mar 2016

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