Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Ewen Blair; Damion Corrigan; Ilka Schmueser; Jonathan Terry; Stewart Smith; Andrew Mount; Anthony Walton

doi:10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Ewen Blair, Damion Corrigan, Ilka Schmueser, Jonathan Terry, Stewart Smith, Andrew Mount, Anthony Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.

Original language	English
Title of host publication	2016 International Conference on Microelectronic Test Structures (ICMTS)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	158-162
Number of pages	5
DOIs	https://doi.org/10.1109/ICMTS.2016.7476198
Publication status	Published - 29 Mar 2016

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2 Finished

REFINE: a coordinated materials programme for the sustainable REduction of spemt Fuel vital In a closed loop Nuclear Energy
Mount, A.
EPSRC
1/10/11 → 30/09/15
Project: Research
ACSEPT: Actinide reCycling by SEParation and Transutation
Mount, A.
EU government bodies
1/03/08 → 30/09/12
Project: Research

Data from "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts"
Blair, E. (Creator) & Walton, A. (Creator), Edinburgh DataShare, 5 Feb 2016
DOI: 10.7488/ds/1336
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Cite this

Blair, E., Corrigan, D., Schmueser, I., Terry, J., Smith, S., Mount, A., & Walton, A. (2016). Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. In 2016 International Conference on Microelectronic Test Structures (ICMTS) (pp. 158-162). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICMTS.2016.7476198

Blair, Ewen ; Corrigan, Damion ; Schmueser, Ilka ; Terry, Jonathan ; Smith, Stewart ; Mount, Andrew ; Walton, Anthony. / Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. 2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE), 2016. pp. 158-162

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title = "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts",

abstract = "This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.",

author = "Ewen Blair and Damion Corrigan and Ilka Schmueser and Jonathan Terry and Stewart Smith and Andrew Mount and Anthony Walton",

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doi = "10.1109/ICMTS.2016.7476198",

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Blair, E, Corrigan, D, Schmueser, I , Terry, J , Smith, S , Mount, A & Walton, A 2016, Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. in 2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE), pp. 158-162. https://doi.org/10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. / Blair, Ewen; Corrigan, Damion; Schmueser, Ilka ; Terry, Jonathan ; Smith, Stewart ; Mount, Andrew; Walton, Anthony.

2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE), 2016. p. 158-162.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Smith, Stewart

AU - Mount, Andrew

AU - Walton, Anthony

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AB - This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.

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Blair E, Corrigan D, Schmueser I , Terry J , Smith S , Mount A et al. Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. In 2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE). 2016. p. 158-162 https://doi.org/10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Abstract

Access to Document

REFINE: a coordinated materials programme for the sustainable REduction of spemt Fuel vital In a closed loop Nuclear Energy

ACSEPT: Actinide reCycling by SEParation and Transutation

Data from "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts"

Cite this