Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Ewen Blair; Damion Corrigan; Ilka Schmueser; Jonathan Terry; Stewart Smith; Andrew Mount; Anthony Walton

doi:10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Ewen Blair, Damion Corrigan, Ilka Schmueser, Jonathan Terry, Stewart Smith, Andrew Mount, Anthony Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.

Original language	English
Title of host publication	2016 International Conference on Microelectronic Test Structures (ICMTS)
Publisher	Institute of Electrical and Electronics Engineers
Pages	158-162
Number of pages	5
DOIs	https://doi.org/10.1109/ICMTS.2016.7476198
Publication status	Published - 29 Mar 2016

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10.1109/ICMTS.2016.7476198

REFINE: a coordinated materials programme for the sustainable REduction of spemt Fuel vital In a closed loop Nuclear Energy
Mount, A. (Principal Investigator)
EPSRC
1/10/11 → 30/09/15
Project: Research
ACSEPT: Actinide reCycling by SEParation and Transutation
Mount, A. (Principal Investigator)
EU government bodies
1/03/08 → 30/09/12
Project: Research

Data from "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts"
Blair, E. (Creator) & Walton, A. (Creator), Edinburgh DataShare, 5 Feb 2016
DOI: 10.7488/ds/1336
Dataset

Cite this

Blair, E., Corrigan, D., Schmueser, I., Terry, J., Smith, S., Mount, A., & Walton, A. (2016). Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. In 2016 International Conference on Microelectronic Test Structures (ICMTS) (pp. 158-162). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICMTS.2016.7476198

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title = "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts",

abstract = "This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.",

author = "Ewen Blair and Damion Corrigan and Ilka Schmueser and Jonathan Terry and Stewart Smith and Andrew Mount and Anthony Walton",

year = "2016",

month = mar,

day = "29",

doi = "10.1109/ICMTS.2016.7476198",

language = "English",

pages = "158--162",

booktitle = "2016 International Conference on Microelectronic Test Structures (ICMTS)",

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Blair, E, Corrigan, D, Schmueser, I , Terry, J , Smith, S , Mount, A & Walton, A 2016, Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. in 2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers, pp. 158-162. https://doi.org/10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. / Blair, Ewen; Corrigan, Damion; Schmueser, Ilka et al.
2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers, 2016. p. 158-162.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

AU - Blair, Ewen

AU - Corrigan, Damion

AU - Schmueser, Ilka

AU - Terry, Jonathan

AU - Smith, Stewart

AU - Mount, Andrew

AU - Walton, Anthony

PY - 2016/3/29

Y1 - 2016/3/29

N2 - This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.

AB - This paper reports the design and application of test structures for both the development and characterisation of microelectrodes for operation in the caustic harsh environment of molten salts operating at temperatures of 450oC. These have been employed to understand the effect of critical area and dielectric integrity in the molten salt. This has led to optimisation of both fabrication and design of the microelectrodes as well as for process verification.

U2 - 10.1109/ICMTS.2016.7476198

DO - 10.1109/ICMTS.2016.7476198

M3 - Conference contribution

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BT - 2016 International Conference on Microelectronic Test Structures (ICMTS)

PB - Institute of Electrical and Electronics Engineers

ER -

Blair E, Corrigan D, Schmueser I , Terry J , Smith S , Mount A et al. Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts. In 2016 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers. 2016. p. 158-162 doi: 10.1109/ICMTS.2016.7476198

Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts

Abstract

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Projects

REFINE: a coordinated materials programme for the sustainable REduction of spemt Fuel vital In a closed loop Nuclear Energy

ACSEPT: Actinide reCycling by SEParation and Transutation

Datasets

Data from "Test Structures to support the Development and Process Verification of Microelectrodes for High Temperature Operation in Molten Salts"

Cite this