The Application of Photolithography to the Fabrication of Microcircuits

Tom Stevenson, A. M. Gundlach

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)654-667
Number of pages14
JournalJournal of Physics E: Scientific Instruments
Volume19
Publication statusPublished - 1986

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