The Automatic Generation of Conformal 3D Data for Simulation of IC Interconnect Parasitics and Representation of MEM Structures

J. P. Elliott, G. A. Allan, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationESSDERC
Pages4
Number of pages1
Publication statusPublished - 1995

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