The Effect of Contact Geometry on the Value of Contact Resistivity Extracted from Kelvin Structures

K. W. J. Findlay, W. J. C. Alexander, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings 1989 IEEE International Conference on Microelectronic Test Structures
Pages	6
Number of pages	1
Publication status	Published - 1989

Cite this

@inproceedings{f9f5e29172db498483501f313b5842ac,

title = "The Effect of Contact Geometry on the Value of Contact Resistivity Extracted from Kelvin Structures",

author = "Findlay, {K. W. J.} and Alexander, {W. J. C.} and Walton, {A. J.}",

year = "1989",

language = "Undefined/Unknown",

pages = "6",

booktitle = "Proceedings 1989 IEEE International Conference on Microelectronic Test Structures",

}