The Effect of Contact Geometry on the Value of Contact Resistivity Extracted from Kelvin Structures

K. W. J. Findlay, W. J. C. Alexander, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings 1989 IEEE International Conference on Microelectronic Test Structures
Pages6
Number of pages1
Publication statusPublished - 1989

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