The Electrical Characteristics of 4H-SiC Schottky Diodes after ICP etching

N. O. V. Plank, L. Jiang, A. M. Gundlach, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)964-971
Number of pages8
JournalJournal of Electronic Materials
Volume32
Publication statusPublished - 2003

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