The fabrication of electrical linewidth structures capable of TEM measurement using standard wafers

C.G. Munro, A M Gundlach, J T M Stevenson, D.W. Travis, S Smith, N.S. Rankin, A J Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Pages13-17
Number of pages5
Publication statusPublished - 1999

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