Original language | English |
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Title of host publication | Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on |
Pages | 13-17 |
Number of pages | 5 |
Publication status | Published - 1999 |
The fabrication of electrical linewidth structures capable of TEM measurement using standard wafers
C.G. Munro, A M Gundlach, J T M Stevenson, D.W. Travis, S Smith, N.S. Rankin, A J Walton
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution