The manufacture of aluminium micromirror arays using a dual damascene process

D. W. Calton, J. T. M. Stevenson, I. Underwood, A. M. Gundlach

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings SPIE on Miniaturized systems with micro-optics and MEMs
Pages	9
Number of pages	1
Publication status	Published - 1999

Cite this

@inproceedings{bd939e09a52e488e8f5a977e80dde444,

title = "The manufacture of aluminium micromirror arays using a dual damascene process",

author = "Calton, \{D. W.\} and Stevenson, \{J. T. M.\} and I. Underwood and Gundlach, \{A. M.\}",

year = "1999",

language = "Undefined/Unknown",

pages = "9",

booktitle = "Proceedings SPIE on Miniaturized systems with micro-optics and MEMs",

}