Projects per year
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 422-426 |
Number of pages | 5 |
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
Volume | 206 |
Publication status | Published - 2003 |
Projects
- 1 Finished
-
Micro-cavity techniques for gettering trace impurities in advanced semiconductor devices.
Haworth, L.
1/02/99 → 30/09/02
Project: Research