The use of Cavities for Getting in Silicon Microelectronic Devices

S. E. Donnelly, V. M. Vishnyakov, G. Carter, Jonathan Terry, Leslie Haworth, P. Sermanni, R. C. Birtcher

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)422-426
Number of pages5
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume206
Publication statusPublished - 2003

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