The use of Cavities for Getting in Silicon Microelectronic Devices

S. E. Donnelly, V. M. Vishnyakov, G. Carter, Jonathan Terry, Leslie Haworth, P. Sermanni, R. C. Birtcher

School of Engineering

Research output: Contribution to journal › Article › peer-review

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Micro-cavity techniques for gettering trace impurities in advanced semiconductor devices.
Haworth, L.
EPSRC
1/02/99 → 30/09/02
Project: Research