TY - JOUR
T1 - Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes
AU - Malshe, A. P.
AU - Rajurkar, K. P.
AU - Virwani, K. R.
AU - Taylor, C. R.
AU - Bourell, D. L.
AU - Levy, G.
AU - Sundaram, M. M.
AU - McGeough, J. A.
AU - Kalyanasundaram, V.
AU - Samant, A. N.
PY - 2010
Y1 - 2010
N2 - Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. Iris driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications - performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations. (C) 2010 CIRP.
AB - Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. Iris driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications - performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations. (C) 2010 CIRP.
U2 - 10.1016/j.cirp.2010.05.006
DO - 10.1016/j.cirp.2010.05.006
M3 - Article
SN - 0007-8506
VL - 59
SP - 628
EP - 651
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 2
ER -