Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

A. P. Malshe, K. P. Rajurkar, K. R. Virwani, C. R. Taylor, D. L. Bourell, G. Levy, M. M. Sundaram, J. A. McGeough, V. Kalyanasundaram, A. N. Samant

Research output: Contribution to journalArticlepeer-review

Abstract

Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. Iris driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications - performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations. (C) 2010 CIRP.

Original languageEnglish
Pages (from-to)628-651
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Volume59
Issue number2
DOIs
Publication statusPublished - 2010

Fingerprint

Dive into the research topics of 'Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes'. Together they form a unique fingerprint.

Cite this