Tunability of Piezoelectric MEMS Ring Resonator Based Filter

Boris Sviličić, Graham Wood, Enrico Mastropaolo, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Abstract

The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission frequency response have shown that the device with the ring diameter of 260 μm resonates at 1.082 MHz and a frequency tuning range of about 3,200 ppm has been achieved by applying DC bias voltage in the range 0 V – 6 V. Experimental results have shown that, under the same operating conditions, a wider frequency tuning range has been detected when the device was actuated and tuned with the piezoelectric actuator that covers a larger area of the ring surface and surrounds the central hole of the ring resonant structure.
Original languageEnglish
Pages (from-to)1517-1520
Number of pages4
JournalProcedia Engineering
Volume168
DOIs
Publication statusPublished - 4 Jan 2017
EventEUROSENSORS 2016, 30th European Conference on Solid-State Transducers - Budapest, Hungary
Duration: 4 Sep 20167 Sep 2016

Keywords

  • MEMS resonator
  • Tunable filter
  • Piezoelectric actuation
  • Piezoelectric sensing

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