Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS

G. A. Cook, M. G. Dowsett, C. Hill, P. J. Pearson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Second International Workshop on the Characterisation of Ultra Shallow Doping Structures in Semiconductor Structures
Publication status	Published - 1993

Cite this

@inproceedings{f1cef5a4b3884b40b259367cf417133d,

title = "Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS",

author = "Cook, {G. A.} and Dowsett, {M. G.} and C. Hill and Pearson, {P. J.} and Walton, {A. J.}",

year = "1993",

language = "Undefined/Unknown",

booktitle = "Second International Workshop on the Characterisation of Ultra Shallow Doping Structures in Semiconductor Structures",

}