Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS

G. A. Cook, M. G. Dowsett, C. Hill, P. J. Pearson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationSecond International Workshop on the Characterisation of Ultra Shallow Doping Structures in Semiconductor Structures
Publication statusPublished - 1993

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