Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS

G. A. Cook, M. G. Dowsett, C. Hill, P. J. Pearson, Anthony Walton

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)243-246
Number of pages4
JournalJournal of Vacuum Science and Technology B
Volume12
Issue number1
Publication statusPublished - 1993

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