Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS

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Original language	Undefined/Unknown
Pages (from-to)	243-246
Number of pages	4
Journal	Journal of Vacuum Science and Technology B
Volume	12
Issue number	1
Publication status	Published - 1993

Cite this

@article{2285eeaf0c7c4af69139eae9b1eb7108,

title = "Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS",

author = "Cook, \{G. A.\} and Dowsett, \{M. G.\} and C. Hill and Pearson, \{P. J.\} and Anthony Walton",

year = "1993",

language = "Undefined/Unknown",

volume = "12",

pages = "243--246",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

publisher = "AVS Science and Technology Society",

number = "1",

}

TY - JOUR

T1 - Two Dimensional Dopant Distributions - Modelled and Experimental Using SIMS

AU - Cook, G. A.

AU - Dowsett, M. G.

AU - Hill, C.

AU - Pearson, P. J.

AU - Walton, Anthony

PY - 1993

Y1 - 1993

M3 - Article

SN - 1520-8567

SN - 2166-2754

VL - 12

SP - 243

EP - 246

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 1

ER -