| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 63-69 |
| Number of pages | 7 |
| Journal | Precision Engineering |
| Volume | 11 |
| Issue number | 2 |
| Publication status | Published - 1989 |
Use of gratings and periodic structures as alignment targets on wafer steppers
Tom Stevenson, J. R. Jordan
Research output: Contribution to journal › Article › peer-review