Very high resolution etching of magnetic nanostructures in organic gases

X. Kong, H. P. Zhou, Wyn Williams, S. McVitie, J. M. R. Weaver, C. D. W. Wilkinson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)988-991
Number of pages4
JournalMicroelectronic Engineering
Volume85
Issue number5-6
DOIs
Publication statusPublished - 2008

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