Very high resolution etching of magnetic nanostructures in organic gases

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	988-991
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mee.2007.12.006
Publication status	Published - 2008

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@article{374215c60e844f21b0983a414eaf5e41,

title = "Very high resolution etching of magnetic nanostructures in organic gases",

author = "X. Kong and Zhou, \{H. P.\} and Wyn Williams and S. McVitie and Weaver, \{J. M. R.\} and Wilkinson, \{C. D. W.\}",

year = "2008",

doi = "10.1016/j.mee.2007.12.006",

language = "English",

volume = "85",

pages = "988--991",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-6",

}

TY - JOUR

T1 - Very high resolution etching of magnetic nanostructures in organic gases

AU - Kong, X.

AU - Zhou, H. P.

AU - Williams, Wyn

AU - McVitie, S.

AU - Weaver, J. M. R.

AU - Wilkinson, C. D. W.

PY - 2008

Y1 - 2008

UR - https://www.scopus.com/pages/publications/44149112124

U2 - 10.1016/j.mee.2007.12.006

DO - 10.1016/j.mee.2007.12.006

M3 - Article

SN - 0167-9317

VL - 85

SP - 988

EP - 991

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -