Voids in Silicon: Influence of Defects and Impurities

V. M. Vishnyakov, S. E. Donnelly, G. Carter, P. Walker, L. I. Haworth

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProc. Second Summer School International Workshop on Defect Engineering of Advanced Semiconductor Devices
Publication statusPublished - 2000

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