Voids in Silicon: Influence of Defects and Impurities

V. M. Vishnyakov, S. E. Donnelly, G. Carter, P. Walker, L. I. Haworth

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proc. Second Summer School International Workshop on Defect Engineering of Advanced Semiconductor Devices
Publication status	Published - 2000

Cite this

@inproceedings{1a33a852cc4444aaa082f9cda29eec4f,

title = "Voids in Silicon: Influence of Defects and Impurities",

author = "Vishnyakov, \{V. M.\} and Donnelly, \{S. E.\} and G. Carter and P. Walker and Haworth, \{L. I.\}",

year = "2000",

language = "Undefined/Unknown",

booktitle = "Proc. Second Summer School International Workshop on Defect Engineering of Advanced Semiconductor Devices",

}