TY - JOUR
T1 - Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications
AU - Sviličić, Boris
AU - Mastropaolo, Enrico
AU - Cheung, Rebecca
PY - 2015
Y1 - 2015
N2 - In this paper, we present the design, fabrication and testing of two-port ring microelectromechanical (MEMS) resonant devices with electrothermal actuation and piezoelectric sensing for wide tunable filter applications. The ring resonators have been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The two-port transmission frequency response measurements have shown that the devices with a ring radius between 125. μm and 200. μm resonate in the frequency range 0.4-1.3. MHz, in the presence of tuning. By applying DC bias voltage in the range 4-10. V, a frequency tuning range of 330,000. ppm has been achieved. Devices of similar design but with longer ring radius, actuated under the same operating conditions, have shown a wider frequency tuning range.
AB - In this paper, we present the design, fabrication and testing of two-port ring microelectromechanical (MEMS) resonant devices with electrothermal actuation and piezoelectric sensing for wide tunable filter applications. The ring resonators have been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The two-port transmission frequency response measurements have shown that the devices with a ring radius between 125. μm and 200. μm resonate in the frequency range 0.4-1.3. MHz, in the presence of tuning. By applying DC bias voltage in the range 4-10. V, a frequency tuning range of 330,000. ppm has been achieved. Devices of similar design but with longer ring radius, actuated under the same operating conditions, have shown a wider frequency tuning range.
KW - Electrothermal actuation
KW - MEMS resonator
KW - Piezoelectric sensing
KW - Tunable filter
UR - http://www.scopus.com/inward/record.url?scp=84925003123&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2015.02.023
DO - 10.1016/j.sna.2015.02.023
M3 - Article
SN - 0924-4247
VL - 226
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
ER -