Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications

Boris Sviličić*, Enrico Mastropaolo, Rebecca Cheung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications'. Together they form a unique fingerprint.

Engineering

Physics

Material Science