Abstract
We present the first reported use of a CMOS Single Photon Avalanche Diode (SPAD) array for the detection of high energy photons (X-rays), utilizing a 3D-stacked backside-illuminated (BSI) SPAD image sensor, and cabinet biological X ray irradiator. We detected photon peak energies from 30 to 160 keV. Furthermore, increasing the SPAD bias voltage results in increased X-ray detection. This unveils new applications of CMOS SPADs in X-ray detection and imaging.
| Original language | English |
|---|---|
| Title of host publication | 2019 IEEE SENSORS Proceedings |
| Place of Publication | USA |
| Publisher | Institute of Electrical and Electronics Engineers |
| Number of pages | 4 |
| Publication status | Accepted/In press - 10 Aug 2019 |
| Event | IEEE Sensors 2019 - Palais des congrès de Montréal, Montrea, Canada Duration: 27 Oct 2019 → 30 Oct 2019 https://ieee-sensors2019.org/ |
Conference
| Conference | IEEE Sensors 2019 |
|---|---|
| Country/Territory | Canada |
| City | Montrea |
| Period | 27/10/19 → 30/10/19 |
| Internet address |
Keywords / Materials (for Non-textual outputs)
- Single photon avalanche diode
- CMOS image sensor
- CMOS SPAD
- X-ray detection
- SPAD array
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