ZnO thin film based flexible temperature sensor

Sameer A. Hasan, Des Gibson, Shigeng Song, Qiang Wu, Wai Pang Ng, Glen McHale, John Dean, Y.Q. Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.
Original languageEnglish
Title of host publication2017 IEEE Sensors
Place of PublicationUnited States
PublisherIEEE PES
Pages1530-1532
Number of pages3
ISBN (Print)978-1-5090-1013-4
DOIs
Publication statusPublished - 25 Dec 2017

Publication series

NameIEEE SENSORS
PublisherIEEE

Keywords

  • ZnO
  • thin film
  • Flexible SAW device
  • TCF

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