ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.
|Title of host publication||2017 IEEE Sensors|
|Place of Publication||United States|
|Number of pages||3|
|Publication status||Published - 25 Dec 2017|
- thin film
- Flexible SAW device