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Argon cluster impacts on layered silicon, silica, and graphite surfaces

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Original languageEnglish
Pages (from-to)181-184
Number of pages4
JournalEuropean physical journal d
Volume43
Issue number1-3
DOIs
Publication statusPublished - Jul 2007

Abstract

Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

    Research areas

  • Cluster impact, DEFECTS, SI, MD simulations

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