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Carbon-nanotube-based Nano Electromechanical Switches

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    Rights statement: Copyright © 2008 by The Korean Physical Society. All rights reserved.

    Accepted author manuscript, 819 KB, PDF document

Original languageEnglish
Pages (from-to)957-961
Number of pages5
JournalJournal of the korean physical society
Issue number3
Publication statusPublished - Sep 2009


The fabrication of carbon nanotube (CNT) based nano electromechanical (NEM) switches and their electro-mechanical properties are discussed. Two different types of nano electromechanical switches, a cantilever type and a doubly-clamped type, will be introduced. The proposal of three terminal structures for the CNT-based NEM switch could lead to improvements in the stability of the switching performance. Both dc electro-mechanical properties and high-frequency measurements are used to study the switching performance. A comparison of the switching performances of both types of nano electromechanical switches is discussed at the end of the paper.

    Research areas

  • Carbon nanotube, Nano electromechanical system, Nano electromechanical switch, Cantilever, Doubly clamped suspended system, Electron beam lithography, NANORELAY, RESONATOR, MEMORY

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